DS5 — Final-Training Dataset
Status: READY TO POPULATE (post-implementation)
Aspect
Value
Purpose
Primary deliverable — ML/CD-SEM benchmarking dataset
Size
100,000 samples @1024×1024
Image
1024×1024, 16-bit, 1.0 nm/px
Master seed
5005
Expected volume
~400 GB
Generation config
generation_configs/ds5_final_training.yml
Validation gates
L1, L2, L3, L4 (sampling), L5
Release criteria
All gates pass; benchmark-readiness review; stakeholder sign-off on… See the full description on the dataset page:
https://huggingface.co/datasets/yogeshn07/SEMICON-2026-Localization-DS5-v1.