The benchmark of "LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing"
The corresponding GitHub repo can be found at
https://dw-hongquan.github.io/LithoSim/4 in-distributed dataset (OPC_Metal/Metal/OPC_Via/Via).
1 out-of-distribution (OOD) dataset.
Each main dataset has a train_val and a test folder with compressed data file.
Each set of data contains a source_simple.src description of the source, a layout.png, a… See the full description on the dataset page:
https://huggingface.co/datasets/maxpooling190/LithoSim.
