ClarusC64/

euv-illumination-pupil-coherence-drift-detection-v0.1

Detect when illumination-pupil coupling begins to drift toward loss of critical dimension control. This dataset maps coherence decay between: pupil geometrydose distributionprinted wafer metrics
The goal is to identify drift before feature collapse.

Input system metrics. Predict: drift_scoredrift_flag
Format: float,int Example: 0.42,1

Lithography systems rarely fail instantly.They drift. Early detection prevents yield loss and… See the full description on the dataset page: https://huggingface.co/datasets/ClarusC64/euv-illumination-pupil-coherence-drift-detection-v0.1.