ClarusC64/

euv-illumination-cd-failure-horizon-and-correction-routing-v0.1

Predict how close an EUV tool is to losing critical dimension controland determine the minimal corrective action. The dataset links illumination coherence driftto downstream CD collapse risk.

Given system state, predict: failure_horizon_waferscorrection_route
Format: float,string Example: 45,illumination tuning

Yield loss begins before visible CD failure. Early routing decisions prevent tool downtime and scrap. This dataset… See the full description on the dataset page: https://huggingface.co/datasets/ClarusC64/euv-illumination-cd-failure-horizon-and-correction-routing-v0.1.