Predict the failure horizon of an EUV collector mirrorand route optimal cleaning intervention timing.
A scanner does not fail instantly.Productivity collapses after coherence decay reaches a tipping point.
This dataset maps the final phase:
reflectivity declinepower transmission losscontamination growthcoherence drift
Given system state, output:
estimated_hours_to_failurecleaning_recommendedfailure_horizon_flag
