This dataset is part of WaferSAGE, a framework for wafer defect visual question answering via synthetic data generation, rubric-guided evaluation, and domain-specific post-training of small vision-language models.
The dataset is designed for training and evaluating vision-language models on wafer map understanding tasks, including defect type identification, spatial distribution analysis, morphology description, root-cause hypothesis generation… See the full description on the dataset page:
https://huggingface.co/datasets/Niraya666/WaferSAGE-Wafermap-VQA-Dataset.