Predict when overlay will breach specand route the minimal thermal control response.
This is the third layer of projection optics thermo-mechanical decoupling:
overlay drift scoreoverlay error growthfailure horizon forecastingthermal control routing
Given current tool state, output:
failure_horizon_wafersoverlay_risk_score (0..1)recommended_routing_actionminimal_fix_set
Output format:
float,float,string,string
Example:
55,0.67,coolant retune… See the full description on the dataset page:
https://huggingface.co/datasets/ClarusC64/euv-projection-optics-overlay-failure-horizon-and-thermal-control-routing-v0.1.
