This dataset detects early contamination drift in EUV collector mirrors.
A lithography system fails gradually.The first signal is not throughput collapse.It is coherence loss between:
gas stabilitymirror reflectivityEUV transmitted power
When these stop moving together, contamination is underway.
Given system metrics, output:
coherence_drift_scoredrift_flag
drift_flag = 1 means contamination drift has begundrift_flag = 0 means system remains… See the full description on the dataset page:
https://huggingface.co/datasets/ClarusC64/euv-collector-contamination-drift-detection-v0.1.
